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Fizika i Tekhnika Poluprovodnikov, 2015, Volume 49, Issue 6, Pages 732–736 (Mi phts7304)  

This article is cited in 3 scientific papers (total in 3 papers)

Proceedings of the Conference ''Silicon-2014'', Irkutsk, July 7-12, 2014
Surface, interfaces, thin films

Effect of copper on the recombination activity of extended defects in silicon

O. V. Feklisovaa, E. B. Yakimovab

a Institute of Microelectronics Technology and High-Purity Materials RAS
b National University of Science and Technology «MISIS», Moscow
Full-text PDF (280 kB) Citations (3)
Abstract: The effect of copper atoms introduced by high-temperature diffusion on the recombination properties of dislocations and dislocation trails in $p$-type single-crystal silicon is studied by the electron-beam-induced current technique. It is shown that, in contrast to dislocations, dislocation trails exhibit an increase in recombination activity after the introduction of copper. Bright contrast appearance in the vicinity of dislocation trails is detected after the diffusion of copper and quenching of the samples. The contrast depends on the defect density in these trails.
Received: 20.10.2014
Accepted: 05.11.2014
English version:
Semiconductors, 2015, Volume 49, Issue 6, Pages 716–719
DOI: https://doi.org/10.1134/S106378261506010X
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: O. V. Feklisova, E. B. Yakimov, “Effect of copper on the recombination activity of extended defects in silicon”, Fizika i Tekhnika Poluprovodnikov, 49:6 (2015), 732–736; Semiconductors, 49:6 (2015), 716–719
Citation in format AMSBIB
\Bibitem{FekYak15}
\by O.~V.~Feklisova, E.~B.~Yakimov
\paper Effect of copper on the recombination activity of extended defects in silicon
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2015
\vol 49
\issue 6
\pages 732--736
\mathnet{http://mi.mathnet.ru/phts7304}
\elib{https://elibrary.ru/item.asp?id=24195187}
\transl
\jour Semiconductors
\yr 2015
\vol 49
\issue 6
\pages 716--719
\crossref{https://doi.org/10.1134/S106378261506010X}
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  • https://www.mathnet.ru/eng/phts/v49/i6/p732
  • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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