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Fizika i Tekhnika Poluprovodnikov, 2015, Volume 49, Issue 6, Pages 732–736
(Mi phts7304)
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This article is cited in 3 scientific papers (total in 3 papers)
Proceedings of the Conference ''Silicon-2014'', Irkutsk, July 7-12, 2014
Surface, interfaces, thin films
Effect of copper on the recombination activity of extended defects in silicon
O. V. Feklisovaa, E. B. Yakimovab a Institute of Microelectronics Technology and High-Purity Materials RAS
b National University of Science and Technology «MISIS», Moscow
Abstract:
The effect of copper atoms introduced by high-temperature diffusion on the recombination properties of dislocations and dislocation trails in $p$-type single-crystal silicon is studied by the electron-beam-induced current technique. It is shown that, in contrast to dislocations, dislocation trails exhibit an increase in recombination activity after the introduction of copper. Bright contrast appearance in the vicinity of dislocation trails is detected after the diffusion of copper and quenching of the samples. The contrast depends on the defect density in these trails.
Received: 20.10.2014 Accepted: 05.11.2014
Citation:
O. V. Feklisova, E. B. Yakimov, “Effect of copper on the recombination activity of extended defects in silicon”, Fizika i Tekhnika Poluprovodnikov, 49:6 (2015), 732–736; Semiconductors, 49:6 (2015), 716–719
Linking options:
https://www.mathnet.ru/eng/phts7304 https://www.mathnet.ru/eng/phts/v49/i6/p732
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