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Fizika i Tekhnika Poluprovodnikov, 2015, Volume 49, Issue 7, Pages 951–955
(Mi phts7339)
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Semiconductor structures, low-dimensional systems, quantum phenomena
Resistance of 4H-SiC Schottky barriers at high forward-current densities
P. A. Ivanov, T. P. Samsonova, N. D. Il'inskaya, O. Yu. Serebrennikova, O. I. Kon'kov, A. S. Potapov Ioffe Institute, St. Petersburg
Abstract:
The resistance of Schottky barriers based on 4H-SiC is experimentally determined at high forward-current densities. The measured resistance is found to be significantly higher than the resistance predicted by classical mechanisms of electron transport in Schottky contacts. An assumption concerning the crucial contribution of the tunnel-transparent intermediate oxide layer between the metal and semiconductor to the barrier resistance is proposed and partially justified.
Received: 17.12.2014 Accepted: 25.12.2014
Citation:
P. A. Ivanov, T. P. Samsonova, N. D. Il'inskaya, O. Yu. Serebrennikova, O. I. Kon'kov, A. S. Potapov, “Resistance of 4H-SiC Schottky barriers at high forward-current densities”, Fizika i Tekhnika Poluprovodnikov, 49:7 (2015), 951–955; Semiconductors, 49:7 (2015), 930–934
Linking options:
https://www.mathnet.ru/eng/phts7339 https://www.mathnet.ru/eng/phts/v49/i7/p951
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