Determination of the technological growth parameters in the InAs–GaAs system for the MOCVD synthesis of “Multimodal” InAs QDs

The specific features of growth in the InAs–GaAs system by the metal-organic chemical vapor deposition method are studied. The dependences of the In content of the In$_x$Ga$_{1-x}$As solid solution and of the InAs growth rate on the molar flow of In in a wide temperature range (480–700$^\circ$C) are determined. The growth processes of InAs quantum dots (QDs) on GaAs with different surface misorientations are examined. The conditions are found in which InAs QDs are formed with a small number of defects and at a high density on a GaAs “sublayer” grown at a high rate. An epitaxial technique is developed for the synthesis of InAs QDs with multimodal size distribution and an extended photoluminescence spectrum, which can be effectively used in designing solar cells with QDs in the active region.