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Fizika i Tekhnika Poluprovodnikov, 2015, Volume 49, Issue 9, Pages 1273–1277 (Mi phts7395)  
This article is cited in 2 scientific papers (total in 2 papers)

Semiconductor physics

Effect of catalytic surface modification on the gas sensitivity of SnO$_2$+3% SiO$_2$ films

S. I. Rembezaa, E. S. Rembezaa, N. N. Koshelevaa, V. M. Al Tameemib

a Voronezh State Technical University
b University of Diyala, Daila, Republic Iraq
Full-text PDF (235 kB) Citations (2)
Abstract: Thin SnO$_2$+3% SiO$_2$ (250 nm) films grown by magnetron sputtering in a controlled Ar + O$_2$ atmosphere are used as sensor elements in a gas sensor fabricated by microelectronics technology. The sensor contains two sensitive elements, one of which is used as a control element; the surface of the other was coated with an aqueous solution (3, 6, 9, 12 mmol) of silver nitrate Ag(NO$_3$) and palladium chloride PdCl$_2$. It is found that surface modification by catalysts lowers the temperature of the maximum gas sensitivity of SnO$_2$+3% SiO$_2$ by 100–200$^\circ$C; in some cases, this procedure also increases the maximum gas sensitivity several times.
Received: 15.01.2015
Accepted: 05.02.2015
English version:
Semiconductors, 2015, Volume 49, Issue 9, Pages 1237–1241
DOI: https://doi.org/10.1134/S1063782615090249
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. I. Rembeza, E. S. Rembeza, N. N. Kosheleva, V. M. Al Tameemi, “Effect of catalytic surface modification on the gas sensitivity of SnO$_2$+3% SiO$_2$ films”, Fizika i Tekhnika Poluprovodnikov, 49:9 (2015), 1273–1277; Semiconductors, 49:9 (2015), 1237–1241
Citation in format AMSBIB
\Bibitem{RemRemKos15}
\by S.~I.~Rembeza, E.~S.~Rembeza, N.~N.~Kosheleva, V.~M.~Al Tameemi
\paper Effect of catalytic surface modification on the gas sensitivity of SnO$_2$+3\% SiO$_2$ films
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2015
\vol 49
\issue 9
\pages 1273--1277
\mathnet{http://mi.mathnet.ru/phts7395}
\elib{https://elibrary.ru/item.asp?id=24195284}
\transl
\jour Semiconductors
\yr 2015
\vol 49
\issue 9
\pages 1237--1241
\crossref{https://doi.org/10.1134/S1063782615090249}
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  • https://www.mathnet.ru/eng/phts/v49/i9/p1273
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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