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Fizika i Tekhnika Poluprovodnikov, 2014, Volume 48, Issue 3, Pages 318–321
(Mi phts7532)
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This article is cited in 5 scientific papers (total in 5 papers)
Surface, interfaces, thin films
Interface recombination velocity measurement in SiO$_2$/Si
S. Ilahi, N. Yacoubi Unité de Recherche de caractérisation photo-thermique
IPEIN. Universite de Carthage, La Tunisie
Abstract:
The photothermal technique has been used in its orthogonal configuration in order to determine the interface recombination velocity between SiO$_2$ ultra-thin film and Si substrate. This investigation has been performed by studying the variation of the photothermal signal according to the square root modulation frequency of the pump light beam. A general one-dimensional theoretical model taking into consideration the nonradiative recombination process has been developed. The interface recombination velocity has been evaluated by fitting the experimental curves of the phase and normalized amplitude of the photo-thermal signal with the corresponding theoretical ones.
Keywords:
non-radiative lifetime, photo-thermal deflection, electronic parameters.
Received: 18.03.2013 Accepted: 13.06.2013
Citation:
S. Ilahi, N. Yacoubi, “Interface recombination velocity measurement in SiO$_2$/Si”, Fizika i Tekhnika Poluprovodnikov, 48:3 (2014), 318–321; Semiconductors, 48:3 (2014), 302–306
Linking options:
https://www.mathnet.ru/eng/phts7532 https://www.mathnet.ru/eng/phts/v48/i3/p318
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