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Fizika i Tekhnika Poluprovodnikov, 2014, Volume 48, Issue 6, Pages 753–758
(Mi phts7608)
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This article is cited in 12 scientific papers (total in 12 papers)
Surface, interfaces, thin films
On InAsSbP epitaxial layers with ultimate phosphorus content, lattice-matched with an InAs substrate
V. V. Romanov, M. V. Baidakova, K. D. Moiseev Ioffe Institute, St. Petersburg
Abstract:
Experimental results obtained upon the growth of InAs$_{1-x-y}$Sb$_y$P$_x$ multicomponent solid solutions with 0.43 $< x <$ 0.72 by metal-organic vapor-phase epitaxy at low deposition temperatures ($T<$ 520$^\circ$C) with a metal-organic source of arsenic are presented. A model is suggested for describing the growth of an InAsSbP epitaxial layer that is isomorphic with the InAs substrate at a given ratio between the phosphorus and antimony concentrations in the solid phase.
Received: 08.10.2013 Accepted: 21.10.2013
Citation:
V. V. Romanov, M. V. Baidakova, K. D. Moiseev, “On InAsSbP epitaxial layers with ultimate phosphorus content, lattice-matched with an InAs substrate”, Fizika i Tekhnika Poluprovodnikov, 48:6 (2014), 753–758; Semiconductors, 48:6 (2014), 733–738
Linking options:
https://www.mathnet.ru/eng/phts7608 https://www.mathnet.ru/eng/phts/v48/i6/p753
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