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Fizika i Tekhnika Poluprovodnikov, 2014, Volume 48, Issue 6, Pages 759–762 (Mi phts7609)  
This article is cited in 2 scientific papers (total in 2 papers)

Surface, interfaces, thin films

Properties of TiO$_2$ films on silicon substrate

V. M. Kalygina, V. A. Novikov, Yu. S. Petrova, O. P. Tolbanov, E. V. Chernikov, S. Yu. Tsupiy, T. M. Yaskevich

Siberian Physical-Technical Institute of the Tomsk State University
Full-text PDF (847 kB) Citations (2)
Abstract: Influence of the substrate material and the effect of oxygen plasma on the microprofile and electrical properties of TiO$_2$ films deposited by radio-frequency magnetron sputtering are studied. It is shown that the most continuous films with the smallest roughness are obtained when deposited onto silicon substrates. The change in the capacitance-voltage and conductance-voltage characteristics of the structures upon their exposure to oxygen plasma is accounted for by the diffusion of oxygen atoms across the titanium-dioxide film and by the appearance of a SiO$_2$ layer at the Si–TiO$_2$ interface.
Received: 10.09.2013
Accepted: 21.09.2013
English version:
Semiconductors, 2014, Volume 48, Issue 6, Pages 739–742
DOI: https://doi.org/10.1134/S1063782614060141
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. M. Kalygina, V. A. Novikov, Yu. S. Petrova, O. P. Tolbanov, E. V. Chernikov, S. Yu. Tsupiy, T. M. Yaskevich, “Properties of TiO$_2$ films on silicon substrate”, Fizika i Tekhnika Poluprovodnikov, 48:6 (2014), 759–762; Semiconductors, 48:6 (2014), 739–742
Citation in format AMSBIB
\Bibitem{KalNovPet14}
\by V.~M.~Kalygina, V.~A.~Novikov, Yu.~S.~Petrova, O.~P.~Tolbanov, E.~V.~Chernikov, S.~Yu.~Tsupiy, T.~M.~Yaskevich
\paper Properties of TiO$_2$ films on silicon substrate
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2014
\vol 48
\issue 6
\pages 759--762
\mathnet{http://mi.mathnet.ru/phts7609}
\elib{https://elibrary.ru/item.asp?id=22018861}
\transl
\jour Semiconductors
\yr 2014
\vol 48
\issue 6
\pages 739--742
\crossref{https://doi.org/10.1134/S1063782614060141}
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  • https://www.mathnet.ru/eng/phts/v48/i6/p759
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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