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Fizika i Tekhnika Poluprovodnikov, 2014, Volume 48, Issue 8, Pages 1070–1074 (Mi phts7671)  
This article is cited in 1 scientific paper (total in 1 paper)

Semiconductor structures, low-dimensional systems, quantum phenomena

Variations in the electrical properties of silicon MOS structures with a nanodimensional silicon oxide under the effect of water vapors

P. P. Fastykovsky, M. A. Glauberman

I. I. Mechnikov Odessa National University
Full-text PDF (167 kB) Citations (1)
Abstract: The dependences of surface potential and the density of surface states of silicon MOS structures with nanoscale silicon oxide on the humidity of the surrounding gaseous medium were investigated. Based on the model of moisture sensitivity of such structures being in depletion modes and weak inversion, an analytical dependence of the surface potential on the humidity was received and the criteria of its linearity were determined. The validity of the analytical dependence was confirmed experimentally.
Received: 21.03.2013
Accepted: 29.04.2013
English version:
Semiconductors, 2014, Volume 48, Issue 8, Pages 1041–1045
DOI: https://doi.org/10.1134/S1063782614080119
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: P. P. Fastykovsky, M. A. Glauberman, “Variations in the electrical properties of silicon MOS structures with a nanodimensional silicon oxide under the effect of water vapors”, Fizika i Tekhnika Poluprovodnikov, 48:8 (2014), 1070–1074; Semiconductors, 48:8 (2014), 1041–1045
Citation in format AMSBIB
\Bibitem{FasGla14}
\by P.~P.~Fastykovsky, M.~A.~Glauberman
\paper Variations in the electrical properties of silicon MOS structures with a nanodimensional silicon oxide under the effect of water vapors
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2014
\vol 48
\issue 8
\pages 1070--1074
\mathnet{http://mi.mathnet.ru/phts7671}
\elib{https://elibrary.ru/item.asp?id=22018913}
\transl
\jour Semiconductors
\yr 2014
\vol 48
\issue 8
\pages 1041--1045
\crossref{https://doi.org/10.1134/S1063782614080119}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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