Structural and optical properties of heavily doped Al$_x$Ga$_{1-x}$As$_{1-y}$P$_y$:Mg alloys produced by metal-organic chemical vapor deposition

The high-resolution X-ray diffraction technique, Raman spectroscopy, and photoluminescence spectroscopy are used to study the structural, optical, and electron energy properties of epitaxial Al$_x$Ga$_{1-x}$As$_{1-y}$P$_y$:Mg alloy films grown by metal-organic chemical vapor deposition (MOCVD). It is shown that the introduction of a Mg impurity into the quaternary alloy provides high charge-carrier concentrations. A decrease in the growth temperature yields a decrease in the charge-carrier concentration in films doped with magnesium at a small gas-carrier flux of the acceptor impurity, whereas an increase in the flux results in an increase in the acceptor-impurity concentration, which is reflected in the character of the photoluminescence spectra.