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Fizika i Tekhnika Poluprovodnikov, 2013, Volume 47, Issue 5, Pages 710–716 (Mi phts7912)  

This article is cited in 23 scientific papers (total in 23 papers)

Manufacturing, processing, testing of materials and structures

Chemical passivation of InSb (100) substrates in aqueous solutions of sodium sulfide

T. V. L'vovaa, M. S. Dunaevskiia, M. V. Lebedeva, A. L. Shakhminb, I. V. Sedovaa, S. V. Ivanova

a Ioffe Institute, St. Petersburg
b Peter the Great St. Petersburg Polytechnic University
Abstract: The elemental composition and electronic structure of both native-oxide-covered InSb (100) substrates and substrates treated in aqueous solutions of sodium sulfide are analyzed by X-ray photoelectron spectroscopy. It is found that, as a result of treatment in a 1 M aqueous solution of Na$_2$S and subsequent annealing in vacuum at 150$^\circ$C, the surface layer consisting of complex antimony and indium oxides of nonstoichiometric composition is removed completely with the formation of a continuous layer of chemisorbed sulfur atoms coherently bound to indium atoms. According to atomic-force microscopy data, no etching of the host substrate material occurs during sulfide passivation. A shift (by 0.37 eV) of the In–Sb bulk photoemission towards higher binding energies is found, which indicates that the surface Fermi level shifts deeper into the conduction band.
Received: 03.10.2012
Accepted: 17.10.2012
English version:
Semiconductors, 2013, Volume 47, Issue 5, Pages 721–727
DOI: https://doi.org/10.1134/S106378261305014X
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: T. V. L'vova, M. S. Dunaevskii, M. V. Lebedev, A. L. Shakhmin, I. V. Sedova, S. V. Ivanov, “Chemical passivation of InSb (100) substrates in aqueous solutions of sodium sulfide”, Fizika i Tekhnika Poluprovodnikov, 47:5 (2013), 710–716; Semiconductors, 47:5 (2013), 721–727
Citation in format AMSBIB
\Bibitem{LvoDunLeb13}
\by T.~V.~L'vova, M.~S.~Dunaevskii, M.~V.~Lebedev, A.~L.~Shakhmin, I.~V.~Sedova, S.~V.~Ivanov
\paper Chemical passivation of InSb (100) substrates in aqueous solutions of sodium sulfide
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2013
\vol 47
\issue 5
\pages 710--716
\mathnet{http://mi.mathnet.ru/phts7912}
\elib{https://elibrary.ru/item.asp?id=20319451}
\transl
\jour Semiconductors
\yr 2013
\vol 47
\issue 5
\pages 721--727
\crossref{https://doi.org/10.1134/S106378261305014X}
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  • https://www.mathnet.ru/eng/phts/v47/i5/p710
  • This publication is cited in the following 23 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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