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Fizika i Tekhnika Poluprovodnikov, 2013, Volume 47, Issue 7, Pages 997–1001 (Mi phts7976)  
This article is cited in 25 scientific papers (total in 25 papers)

Manufacturing, processing, testing of materials and structures

Properties of Sb$_2$S$_3$ and Sb$_2$Sе$_3$ thin films obtained by pulsed laser ablation

I. S. Virtab, I. A. Rudyjc, I. V. Kuriloc, I. E. Lopatynskyic, L. F. Linnikd, V. V. Tetyorkind, P. Poterab, G. Lukae

a Drohobych Ivan Franko State Pedagogical University
b Rzeszow University, Rzeszow, Poland
c Lviv Polytechnic National University
d Institute of Semiconductor Physics NAS, Kiev
e Institute of Physics, Polish Academy of Sciences, Warsaw, Poland
Full-text PDF (849 kB) Citations (25)
Abstract: The properties of Sb$_2$S$_3$ and Sb$_2$Sе$_3$ thin films of variable thickness deposited onto Al$_2$O$_3$, Si, and KCl substrates are investigated by the method of pulsed laser ablation. The samples are obtained at a substrate temperature of 180$^\circ$C in a vacuum chamber with a residual pressure of 10$^{-5}$ Torr. The thickness of the films amounted to 40–1500 nm. The structure of the bulk material of the targets and films is investigated by the methods of X-ray diffraction and transmission high-energy electron diffraction, respectively. The electrical properties of the films are investigated in the temperature range of 253–310 K. It is shown that the films have semiconductor properties. The structural features of the films determine their optical parameters.
Received: 01.10.2012
Accepted: 20.10.2012
English version:
Semiconductors, 2013, Volume 47, Issue 7, Pages 1003–1007
DOI: https://doi.org/10.1134/S1063782613070233
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: I. S. Virt, I. A. Rudyj, I. V. Kurilo, I. E. Lopatynskyi, L. F. Linnik, V. V. Tetyorkin, P. Potera, G. Luka, “Properties of Sb$_2$S$_3$ and Sb$_2$Sе$_3$ thin films obtained by pulsed laser ablation”, Fizika i Tekhnika Poluprovodnikov, 47:7 (2013), 997–1001; Semiconductors, 47:7 (2013), 1003–1007
Citation in format AMSBIB
\Bibitem{VirRudKur13}
\by I.~S.~Virt, I.~A.~Rudyj, I.~V.~Kurilo, I.~E.~Lopatynskyi, L.~F.~Linnik, V.~V.~Tetyorkin, P.~Potera, G.~Luka
\paper Properties of Sb$_2$S$_3$ and Sb$_2$Sе$_3$ thin films obtained by pulsed laser ablation
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2013
\vol 47
\issue 7
\pages 997--1001
\mathnet{http://mi.mathnet.ru/phts7976}
\elib{https://elibrary.ru/item.asp?id=20319502}
\transl
\jour Semiconductors
\yr 2013
\vol 47
\issue 7
\pages 1003--1007
\crossref{https://doi.org/10.1134/S1063782613070233}
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  • https://www.mathnet.ru/eng/phts/v47/i7/p997
    • This publication is cited in the following 25 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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