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Fizika i Tekhnika Poluprovodnikov, 2013, Volume 47, Issue 9, Pages 1276–1278 (Mi phts8023)  
This article is cited in 3 scientific papers (total in 3 papers)

Manufacturing, processing, testing of materials and structures

Properties of silicon films grown under different pressures in a plasma-forming system

D. M. Mitinab, A. A. Serdobintsevab

a Saratov State University
b Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences
Full-text PDF (182 kB) Citations (3)
Abstract: The influence of the working-gas pressure on the properties of thin silicon films synthesized by dc magnetron sputtering is investigated. Films obtained under lower pressures are characterized by lower roughness and resistivity. These features can qualitatively be explained by the longer free particle path in the deposition flux under lower pressure.
Received: 29.11.2012
Accepted: 10.12.2012
English version:
Semiconductors, 2013, Volume 46, Issue 9, Pages 1264–1266
DOI: https://doi.org/10.1134/S1063782613090169
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. M. Mitin, A. A. Serdobintsev, “Properties of silicon films grown under different pressures in a plasma-forming system”, Fizika i Tekhnika Poluprovodnikov, 47:9 (2013), 1276–1278; Semiconductors, 46:9 (2013), 1264–1266
Citation in format AMSBIB
\Bibitem{MitSer13}
\by D.~M.~Mitin, A.~A.~Serdobintsev
\paper Properties of silicon films grown under different pressures in a plasma-forming system
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2013
\vol 47
\issue 9
\pages 1276--1278
\mathnet{http://mi.mathnet.ru/phts8023}
\elib{https://elibrary.ru/item.asp?id=20319566}
\transl
\jour Semiconductors
\yr 2013
\vol 46
\issue 9
\pages 1264--1266
\crossref{https://doi.org/10.1134/S1063782613090169}
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  • https://www.mathnet.ru/eng/phts/v47/i9/p1276
    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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