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Fizika i Tekhnika Poluprovodnikov, 2013, Volume 47, Issue 10, Pages 1327–1334 (Mi phts8034)  

This article is cited in 6 scientific papers (total in 6 papers)

Semiconductor structures, low-dimensional systems, quantum phenomena

Synchrotron study of the formation of nanoclusters in Al$_2$O$_3$/SiO$_x$/Al$_2$O$_3$/SiO$_x$/$\dots$/Si(100) multilayer nanostructures

S. Yu. Turishcheva, V. A. Terekhova, D. A. Koyudaa, K. N. Pankova, A. V. Ershovb, D. A. Grachevb, A. I. Mashinb, È. P. Domashevskayaa

a Voronezh State University
b Lobachevsky State University of Nizhny Novgorod
Full-text PDF (591 kB) Citations (6)
Abstract: Al$_2$O$_3$/SiO$_x$/Al$_2$O$_3$/SiO$_x$/$\dots$/Si(100) multilayer nanoperiodic structures (MNS) are studied by X-ray absorption near-edge structure spectroscopy (XANES). Experimental XANES spectroscopy spectra are obtained using synchrotron radiation. The formation of Si nanoclusters in the surface layers of the structures during their high-temperature annealing is observed. The structures featured intense size-dependent photoluminescence in the wavelength region near 800 nm. At the same time, it is shown that the formation of aluminum silicates is possible. The inversion effect of the intensity of the XANES spectra during the interaction of synchrotron radiation with MNSs is revealed.
Received: 12.02.2013
Accepted: 25.02.2013
English version:
Semiconductors, 2013, Volume 47, Issue 10, Pages 1316–1323
DOI: https://doi.org/10.1134/S106378261310028X
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. Yu. Turishchev, V. A. Terekhov, D. A. Koyuda, K. N. Pankov, A. V. Ershov, D. A. Grachev, A. I. Mashin, È. P. Domashevskaya, “Synchrotron study of the formation of nanoclusters in Al$_2$O$_3$/SiO$_x$/Al$_2$O$_3$/SiO$_x$/$\dots$/Si(100) multilayer nanostructures”, Fizika i Tekhnika Poluprovodnikov, 47:10 (2013), 1327–1334; Semiconductors, 47:10 (2013), 1316–1323
Citation in format AMSBIB
\Bibitem{TurTerKoy13}
\by S.~Yu.~Turishchev, V.~A.~Terekhov, D.~A.~Koyuda, K.~N.~Pankov, A.~V.~Ershov, D.~A.~Grachev, A.~I.~Mashin, \`E.~P.~Domashevskaya
\paper Synchrotron study of the formation of nanoclusters in Al$_2$O$_3$/SiO$_x$/Al$_2$O$_3$/SiO$_x$/$\dots$/Si(100) multilayer nanostructures
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2013
\vol 47
\issue 10
\pages 1327--1334
\mathnet{http://mi.mathnet.ru/phts8034}
\elib{https://elibrary.ru/item.asp?id=20319577}
\transl
\jour Semiconductors
\yr 2013
\vol 47
\issue 10
\pages 1316--1323
\crossref{https://doi.org/10.1134/S106378261310028X}
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  • https://www.mathnet.ru/eng/phts/v47/i10/p1327
  • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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