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Fizika i Tekhnika Poluprovodnikov, 2012, Volume 46, Issue 2, Pages 274–277
(Mi phts8162)
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This article is cited in 12 scientific papers (total in 12 papers)
Manufacturing, processing, testing of materials and structures
Combined single-crystalline and polycrystalline CVD diamond substrates for diamond electronics
A. L. Vikhareva, A. M. Gorbacheva, M. P. Duhnovskiib, A. B. Muchnikova, A. K. Ratnikovab, Yu. Yu. Fedorovb a Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod
b Research and Production Corporation "Istok" named after Shokin, Fryazino, Moskovskaya obl.
Abstract:
The fabrication of diamond substrates in which single-crystalline and polycrystalline CVD diamond form a single wafer, and the epitaxial growth of diamond films on such combined substrates containing polycrystalline and (100) single-crystalline CVD diamond regions are studied.
Received: 04.07.2011 Accepted: 11.07.2011
Citation:
A. L. Vikharev, A. M. Gorbachev, M. P. Duhnovskii, A. B. Muchnikov, A. K. Ratnikova, Yu. Yu. Fedorov, “Combined single-crystalline and polycrystalline CVD diamond substrates for diamond electronics”, Fizika i Tekhnika Poluprovodnikov, 46:2 (2012), 274–277; Semiconductors, 46:2 (2012), 263–266
Linking options:
https://www.mathnet.ru/eng/phts8162 https://www.mathnet.ru/eng/phts/v46/i2/p274
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