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Fizika i Tekhnika Poluprovodnikov, 2012, Volume 46, Issue 8, Pages 993–994
(Mi phts8293)
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This article is cited in 4 scientific papers (total in 4 papers)
Non-electronic properties of semiconductors (atomic structure, diffusion)
Solubility of sulfur in silicon
V. B. Shuman, A. A. Makhova, Yu. A. Astrov, A. M. Ivanov, A. N. Lodygin Ioffe Institute, St. Petersburg
Abstract:
The available published experimental data on the maximum possible concentration of sulfur dissolved in silicon as a function of temperature are analyzed. The authors’ recent results demonstrate that the amount of sulfur dissolved in silicon crystals is approximately two times the reference values, which is in agreement with the data given by a number of other studies.
Received: 14.02.2012 Accepted: 15.02.2012
Citation:
V. B. Shuman, A. A. Makhova, Yu. A. Astrov, A. M. Ivanov, A. N. Lodygin, “Solubility of sulfur in silicon”, Fizika i Tekhnika Poluprovodnikov, 46:8 (2012), 993–994; Semiconductors, 46:8 (2012), 969–970
Linking options:
https://www.mathnet.ru/eng/phts8293 https://www.mathnet.ru/eng/phts/v46/i8/p993
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| Abstract page: | 12 | | Full-text PDF : | 1 |
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