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Fizika i Tekhnika Poluprovodnikov, 2012, Volume 46, Issue 8, Pages 1027–1031 (Mi phts8300)  
This article is cited in 4 scientific papers (total in 4 papers)

Semiconductor structures, low-dimensional systems, quantum phenomena

Electrical characteristics of $n$-GaAs-anode film-Ga$_2$O$_3$-metal structures

V. M. Kalygina, K. I. Valiev, A. N. Zarubin, Yu. S. Petrova, O. P. Tolbanov, A. V. Tyazhev, T. M. Yaskevich

Siberian Physical-Technical Institute of the Tomsk State University
Full-text PDF (224 kB) Citations (4)
Abstract: The influence of oxygen plasma and thermal annealing at 900$^\circ$C on the capacitance-voltage and conductivity-voltage characteristics of $n$-GaAs-(anodic oxide)-metal structures is studied. In contrast to the unannealed structures, high-temperature annealing in Ar for 30 min leads to the emergence of a voltage dependence of the capacitance $(C)$ and conductivity $(G)$. The influence of oxygen plasma on a Ga$_2$O$_3$ film before annealing promotes additional variation in the capacitance-voltage and conductivity-voltage characteristics.
Received: 11.01.2012
Accepted: 18.01.2012
English version:
Semiconductors, 2012, Volume 46, Issue 8, Pages 1003–1007
DOI: https://doi.org/10.1134/S1063782612080088
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. M. Kalygina, K. I. Valiev, A. N. Zarubin, Yu. S. Petrova, O. P. Tolbanov, A. V. Tyazhev, T. M. Yaskevich, “Electrical characteristics of $n$-GaAs-anode film-Ga$_2$O$_3$-metal structures”, Fizika i Tekhnika Poluprovodnikov, 46:8 (2012), 1027–1031; Semiconductors, 46:8 (2012), 1003–1007
Citation in format AMSBIB
\Bibitem{KalValZar12}
\by V.~M.~Kalygina, K.~I.~Valiev, A.~N.~Zarubin, Yu.~S.~Petrova, O.~P.~Tolbanov, A.~V.~Tyazhev, T.~M.~Yaskevich
\paper Electrical characteristics of $n$-GaAs-anode film-Ga$_2$O$_3$-metal structures
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2012
\vol 46
\issue 8
\pages 1027--1031
\mathnet{http://mi.mathnet.ru/phts8300}
\elib{https://elibrary.ru/item.asp?id=20319222}
\transl
\jour Semiconductors
\yr 2012
\vol 46
\issue 8
\pages 1003--1007
\crossref{https://doi.org/10.1134/S1063782612080088}
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  • https://www.mathnet.ru/eng/phts/v46/i8/p1027
    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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