Graduated from Samara State Aerospace University named after S.P. Korolyov (National Research University) (SSAU) in the specialty "Design and Technology of Radio-electronic Means", postgraduate student of Nanoengineering department, works as an engineer in SSAU, probationer-researcher of the Image Processing Systems Institute of the RAS. Research interests: creation technology of diffraction optical elements.
S. D. Poletayev, A. I. Lyubimov, “Specific features of matching of a lower electrode and an RF bias generator for reactive ion etching of bulk substrates”, Zhurnal Tekhnicheskoi Fiziki, 91:4 (2021), 657–663; Tech. Phys., 66:12 (2021), 1294–1300
S. D. Poletayev, A. I. Lyubimov, “Influence of the asymmetry of the metal mask arrangement on the matching of the lower electrode with a high-frequency displacement generator during reactive-ion etching of massive substrates”, Fizika i Tekhnika Poluprovodnikov, 55:12 (2021), 1255–1259
3.
S. D. Poletayev, A. I. Lyubimov, “The influence of metal masks on matching of the lower electrode and a high-frequency bias generator at reactive ion etching of large substrates”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:11 (2021), 44–47; Tech. Phys. Lett., 47:8 (2021), 569–572
2016
4.
S. D. Poletayev, S. G. Volotovsky, “Precision laser recording of microstructures on molybdenum films for generating a diffractive microrelief”, Computer Optics, 40:3 (2016), 422–426
N. L. Kazanskii, S. D. Poletayev, “Numerical simulation of the ablation of thin molybdenum films under laser irradiation”, Zhurnal Tekhnicheskoi Fiziki, 86:9 (2016), 1–6; Tech. Phys., 61:9 (2016), 1279–1285
A. V. Volkov, N. L. Kazanskii, O. Yu. Moiseev, V. D. Paranin, S. D. Poletayev, I. V. Chistyakov, “Specific features of the laser irradiation of thin molybdenum films”, Zhurnal Tekhnicheskoi Fiziki, 86:4 (2016), 101–105; Tech. Phys., 61:4 (2016), 579–583
N. L. Kazanskii, O. Yu. Moiseev, S. D. Poletayev, “Microprofile formation by thermal oxidation of molybdenum films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:3 (2016), 106–110; Tech. Phys. Lett., 42:2 (2016), 164–166
S. N. Khonina, S. A. Degtyarev, A. P. Porfirev, O. Yu. Moiseev, S. D. Poletaev, A. S. Larkin, A. B. Savelyev-Trofimov, “Study of focusing into closely spaced spots via illuminating a diffractive optical element by a short-pulse laser beam”, Computer Optics, 39:2 (2015), 187–196
A. V. Volkov, N. L. Kazanskii, O. Yu. Moiseev, S. D. Poletayev, “Thermal oxidative degradation of molybdenum films under laser ablation”, Zhurnal Tekhnicheskoi Fiziki, 85:2 (2015), 107–111; Tech. Phys., 60:2 (2015), 265–269
A. V. Volkov, O. Yu. Moiseev, S. D. Poletayev, I. V. Chistyakov, “Application of thin molybdenum films in contact masks for manufacturing the micro-relief of diffractive optical elements”, Computer Optics, 38:4 (2014), 757–762
